(15 Jul 2003)
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Microsystems technology encompasses microfabrication techniques and uses a range of expertise from specific design to customized packing and a large range of collective fabrication procedures. This work covers the subject from various aspects, including surface and bulk micromachining and sensors.
| ISBN: | 9781903996478 |
| Publisher: | Kogan Page Science |
| Imprint: | Kogan Page Science |
| Pub date: | 15 Jul 2003 |
| DEWEY: | 621.381 |
| DEWEY edition: | 22 |
| Number of pages: | 295 |
| Weight: | 597g |
| Height: | 234mm |
| Width: | 156mm |
| Spine width: | 28mm |
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