Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [Sic] in Integrated Circuit Device Manufacturing

Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [Sic] in Integrated Circuit Device Manufacturing - Proceedings / Electrochemical Society

Book (01 Jan 1998)

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Book information

ISBN: 9781566772013
Publisher: Electrochemical Society
Imprint: Electrochemical Society
Pub date:
DEWEY: 621.381
DEWEY edition: 21
Language: English
Number of pages: 273
Weight: -1g
Height: 234mm
Width: 158mm
Spine width: 19mm