Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [Sic] in Integrated Circuit Device Manufacturing - Proceedings / Electrochemical Society
Book (01 Jan 1998)
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Book information
ISBN: | 9781566772013 |
Publisher: | Electrochemical Society |
Imprint: | Electrochemical Society |
Pub date: | 01 Jan 1998 |
DEWEY: | 621.381 |
DEWEY edition: | 21 |
Language: | English |
Number of pages: | 273 |
Weight: | -1g |
Height: | 234mm |
Width: | 158mm |
Spine width: | 19mm |