Silicon Molecular Beam Epitaxy

Silicon Molecular Beam Epitaxy

Hardback (30 Jun 1988)

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Publisher's Synopsis

The first of two volumes based on the proceedings of the First International Symposium on Science and Technology held in Toronto, May 1985. Focuses on homoepitaxy along with the necessary systems, techniques, and models for growth and dopant incorporation. Device applications are also covered. Eight chapters. High quality book production. Annotatio

Book information

ISBN: 9780849368301
Publisher: Taylor & Francis
Imprint: CRC Press
Pub date:
Language: English
Number of pages: 256 .
Weight: 881g
Height: 250mm
Width: 190mm