Advances in Resist Materials and Processing Technology XXVII

Advances in Resist Materials and Processing Technology XXVII 22-24 February 2010, San Jose, California, United States - Proceedings of SPIE

Paperback (30 Jun 2010)

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Publisher's Synopsis

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Book information

ISBN: 9780819480538
Publisher: SPIE
Imprint: SPIE
Pub date:
DEWEY: 621.381531
DEWEY edition: 22
Number of pages: 1010
Weight: -1g
Height: 229mm
Width: 152mm