Metrology, Inspection, and Process Control for Microlithography XIII 15-18 March, 1999, Santa Clara, California - SPIE Proceedings Series
Paperback (30 Jun 1999)
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Book information
| ISBN: | 9780819431516 |
| Publisher: | SPIE |
| Imprint: | SPIE |
| Pub date: | 30 Jun 1999 |
| DEWEY: | 621.381531 |
| DEWEY edition: | 21 |
| Language: | English |
| Number of pages: | 1052 |
| Weight: | 2494g |
| Height: | 280mm |
| Width: | 209mm |
| Spine width: | 57mm |
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