Optical Microlithography X

Optical Microlithography X 12-14 March, 1997, Santa Clara, California - SPIE Proceedings Series

Paperback (30 Jun 2006)

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Book information

ISBN: 9780819424655
Publisher: SPIE
Imprint: SPIE
Pub date:
DEWEY: 621.381531
DEWEY edition: 21
Language: English
Number of pages: 982
Weight: 2245g
Height: 266mm
Width: 209mm
Spine width: 44mm

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