Optical Microlithography X

Optical Microlithography X 12-14 March, 1997, Santa Clara, California - SPIE Proceedings Series

Paperback (30 Jun 2006)

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    Book information

    ISBN: 9780819424655
    Publisher: SPIE
    Imprint: SPIE
    Pub date:
    DEWEY: 621.381531
    DEWEY edition: 21
    Language: English
    Number of pages: 982
    Weight: 2245g
    Height: 266mm
    Width: 209mm
    Spine width: 44mm

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