Integrated Circuit Metrology, Inspection, and Process Control IX

Integrated Circuit Metrology, Inspection, and Process Control IX 20-22 February 1995, Santa Clara, California - Proceedings / SPIE--the International Society for Optical Engineering

Hardback (30 Jun 2006)

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    Book information

    ISBN: 9780819417879
    Publisher: SPIE
    Imprint: SPIE
    Pub date:
    DEWEY: 621.381531
    DEWEY edition: 20
    Language: English
    Number of pages: 514
    Weight: -1g
    Height: 280mm

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