Hardback (24 Sep 1991)
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Presents a comprehensive survey of analytical techniques currently used in support of all stages of microelectronic materials and device processing. The diversity of topics covered has been achieved by bringing together an international field of authors contributing specialized chapters.
| ISBN: | 9780471917137 |
| Publisher: | Wiley |
| Imprint: | Wiley Blackwell |
| Pub date: | 24 Sep 1991 |
| DEWEY: | 621.38150287 |
| DEWEY edition: | 20 |
| Number of pages: | 934 |
| Weight: | 1680g |
| Height: | 235mm |
| Width: | 156mm |
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