Hardback (28 May 1998)
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The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.
| ISBN: | 9780198562870 |
| Publisher: | OUP OXFORD |
| Imprint: | Oxford University Press |
| Pub date: | 28 May 1998 |
| DEWEY: | 621.381531 |
| DEWEY edition: | 21 |
| Language: | English |
| Number of pages: | 347 |
| Weight: | 743g |
| Height: | 242mm |
| Width: | 163mm |
| Spine width: | 23mm |
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