Paperback (31 Jan 2001)
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This text covers topics such as: CVD process damage effects; electron shading mechanism; front-end process damage effects; damage in multilevel interconnects; damage effects characterization; 300mm technology; thin dielectrics and degradation mechanisms and antenna test structures and design.
| ISBN: | 9780965157742 |
| Publisher: | I.E.E.E.Press |
| Imprint: | I.E.E.E.Press |
| Pub date: | 31 Jan 2001 |
| Language: | English |
| Number of pages: | 182 |
| Weight: | -1g |
| Height: | 266mm |
| Width: | 209mm |
| Spine width: | 12mm |
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