Hardback (30 Sep 1999)
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This text constitutes the proceedings from the International Symposium on Plasma Process-Induced Damage, which took place in 1999. Topics covered include plasma equipment, electron shading, device characterization and backend process integration.
| ISBN: | 9780965157735 |
| Publisher: | Northern California Chapter of the American Vacuum Society |
| Imprint: | Northern California Chapter of the American Vacuum Society |
| Pub date: | 30 Sep 1999 |
| DEWEY: | 621.38152 |
| DEWEY edition: | 21 |
| Language: | English |
| Number of pages: | 211 |
| Weight: | -1g |
| Height: | 266mm |
| Width: | 209mm |
| Spine width: | 19mm |
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