Hardback (31 Jan 1991)
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Eight contributions address: GaAs on Si, ion beam synthesis in silicon, ion beam processing of chemical vapor deposited silicon layers, technology and devices for silicon based three-dimensional circuits, integrated fabrication of micromechanical structures on silicon, micromachining of silicon for sensors, integrated photonic circuits on silicon,
| ISBN: | 9780792311126 |
| Publisher: | Kluwer Academic |
| Imprint: | Springer |
| Pub date: | 31 Jan 1991 |
| DEWEY: | 621.3815 |
| DEWEY edition: | 20 |
| Language: | English |
| Number of pages: | 277 |
| Weight: | 588g |
| Height: | 234mm |
| Width: | 156mm |
| Spine width: | 19mm |
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