Softcover reprint of the original 1st Edition 1998
Paperback (31 Jul 2012) | German
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Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.
| ISBN: | 9783642973291 |
| Publisher: | Springer |
| Imprint: | Springer |
| Pub date: | 31 Jul 2012 |
| Edition: | Softcover reprint of the original 1st Edition 1998 |
| Language: | German |
| Number of pages: | 240 |
| Weight: | 408g |
| Height: | 234mm |
| Width: | 156mm |
| Spine width: | 15mm |
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