Werkstückbegleitender Informationsspeicher Als Basis Für Ein Informationstechnisches Konzept Für Halbleiterfertigungen - IPA-IAO - Forschung Und Praxis
1st edition
Paperback (07 Nov 1990) | German
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Book information
| ISBN: | 9783540532361 |
| Publisher: | Springer Berlin Heidelberg |
| Imprint: | Springer |
| Pub date: | 07 Nov 1990 |
| Edition: | 1st edition |
| Language: | German |
| Number of pages: | 118 |
| Weight: | 210g |
| Height: | 210mm |
| Width: | 148mm |
| Spine width: | 6mm |
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