eBook (16 Aug 2005)
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Photomasks, the printing masters for the fabrication of integrated circuits, have become a necessity of modern semiconductor manufacturing. This book details the science and technology of industrial photo mask production, including fundamental principles, industrial production flows, and technological evolution.
| ISBN: | 9780071588911 |
| Publisher: | McGraw-Hill Education |
| Imprint: | McGraw Hill |
| Pub date: | 16 Aug 2005 |
| DEWEY: | 621.381531 |
| DEWEY edition: | 22 |
| Number of pages: | 500 |
| Weight: | -1g |
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